​Siargo offers a range of MEMS-based mass flow sensors and meters tailored for the semiconductor industry. These sensors are designed for applications such as die-attachment, wire bonding, and wet chemical bench monitoring. They provide precise measurement and control of gas flows, which is essential for maintaining the quality and efficiency of semiconductor manufacturing processes.

The proprietary MEMS mass flow sensing technology utilized by Siargo features a large dynamic range, high accuracy, and long lifespan. The sensors are equipped with pressure balancers, allowing them to operate effectively under high working pressures. This makes them suitable for the stringent requirements of semiconductor equipment. ​

Siargo’s MEMS mass flow meters are built upon these sensors, offering advanced user interfaces and wireless data capabilities ready for IoT integration. They are designed to automatically recognize pre-programmed flow media, a feature not commonly found in similar products on the market. This functionality enhances the flexibility and adaptability of the meters in various semiconductor applications. ​

By incorporating Siargo’s MEMS mass flow sensors and meters, semiconductor manufacturers can achieve precise control over gas flow processes, leading to improved product quality and operational efficiency.