Siargo is dedicated to offering innovative and customized MEMS sensing products for the semiconductor equipment industry, to meet today’s challenges in precise processes.

• Process control in ALD, photovoltaic, vacuum, deposition, oven control, die-attachment, wire-bonder, and many more
• Offer fast control time, fast response time, flexibility with customization
• Remove some gas sensitivity, excellent gas conversion linearity, and accuracy
• Replace rotameters for better accuracy and reduce gas dependence
• All bus interfaces available